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The stiction and friction influencing the yield and reliability of MEMS are reviewed in this paper.
文章评述了影响微电子机械系统(MEMS)成品率和可靠性的粘合力和摩擦力问题.
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Casimir effect is not the only cause of stiction, but it is an important one.
卡西米尔效应不是这种阻力的唯一起因, 却是幕后主参.
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