This paper discusses one type of micromechanical accelerometer with torsional pendulum.

本文讨论一种扭摆式微机械加速度计.

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This paper discusses the static model of a multi - finger micromechanical accelerometer.

讨论了一种梳齿式微机械加速度计的静态模型.

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A static electrometric method was developed to measure the mechanical parameters of a combfinger micromechanical accelerometer.

为测量梳齿式微机械加速度计敏感元件的机械参数,提出一种静态电测法.

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This work will provide a theoretic foundation for the further optimum design of variable - capacitance micromechanical accelerometer.

本文的研究为微机械电容加速度计的进一步优化设计奠定了坚实的理论基础.

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